Sunburst® Turbo Plus™
The Sunburst Turbo Plus is the most advanced megasonic cleaner in the Marteq portfolio. The patented transducer is PFA-sheathed aluminum allowing it to be used where Quartz transducers can’t. It’s also more efficient at transmitting megasonic energy, enabling it to remove smaller particles, and be used with more sensitive structures than previous Sunburst Turbo generations. Add the optional integrated quickdump rinse for in-situ rinsing. Like all Sunbursts, there’s 100% energy coverage of the wafer at all times without cassette erosion.
• Consistently near-100% particle removal efficiencies to 0.12µm in many applications
• Quartz, PVDF, PP tank materials
• 300mm and smaller wafers
• Compatible with SC-1, SC-2, HF, solvents, and other chemistries
• Cleans and rinses in same tank
• Transducer can be removed and replaced in the field
• Patented new megasonic technology for higher cleaning performance and broader chemical compatibility
• Teflon sheathed aluminum Sunburst TurboPlus (STP) transducer provides more efficient means of transmitting megasonic energy
• Single, dual, and custom cassette applications
• Quartz, PVDF, and Natural Polypropylene tank materials
• 300mm, 200mm, and 150mm models available
• Greater than 97% particle removal efficiency at 0.12µm
• Enables lower temperature processing without loss of cleaning performance
• Strategically located curved transducer directs energy between cassette sidewalls to eliminate shadowing and cassette damage caused by flat transducers
• Optional integrated quickdump rinse for single tank cleaning and megasonic enhanced in-situ rinsing
• Optional transducer upgrade package improves sonic uniformity for damage sensitive devices
• Compatible with chemistries that cannot be used with quartz tranducers increasing flexibility for applications such as HF and solvents
• Higher power and watt-density for special applications
• Core hardware and technology from Verteq’s high- performance VcS system
• The STP transducer is installed in a Verteq tank or can be integrated into an OEM-designed tank
• Non-quartz transducer construction eliminates breakage, and allows explosion- resistant operation with solvents
• Flexible microprocessor controller compatible with PLC and SECSII communication
• Automatic power- and frequency- tuning during process
• Integral nitrogen “bubbler” level sensor and flow sensor to protect the transducer
Sunburst Turbo
Traditional and dilute SC-1, SC-2, and similar chemistries for:
• Pre-Diffusion Clean
• Pre-Epi Clean
• Monitor Wafer Clean
• Post-Laserscribe Clean
• Post-Acid Rinsing
• and more
Substrates
• Silicon wafers, thin wafers
• GaAs wafers
• Hard disks
• Glass, masks, and virtually any substrate up to 300mm