Modutek offers a full range of chemical handling products to address all your semiconductor equipment manufacturing requirements.
Acid Fume Scrubbers
Modutek’s acid fume scrubbers minimize water consumption and optimize fume scrubbing efficiency with automatic pH control of the scrubber water. Besides saving you water we offer a 99 percent removal efficiency rate. Our packed bed fume scrubbers utilizing packing material by Lantec ensures the highest standard of efficiency.
Acid Neutralization System
Modutek Corporation designs and manufactures a complete line of self-contained Acid Neutralization Systems that are compact, easy to install and inexpensive to operate. Continuous flow or batch neutralization systems are available. These unique designs can be modified to fit the specific dimensional requirements of virtually any operation environment.
Chemical Delivery Systems
Modutek’s Chemical Delivery Systems are designed to interface with our complete line of wet processing equipment. From our fully automated line to our manual wet processing station we have a turnkey design to meets your clean room requirements. Large tote chemical containers with load cell interface allow you to control your chemical delivery in large volume eliminating frequent drum change.
Chemical Lift Stations
Modutek’s allows you to pump used chemical and used rinse water directly from your wet processing station to your neutralization area. All chemical lift stations are designed to meet your flow requirements for single or multiple station layouts. As chemical enters the lift station tank our level sensors recognizes flow and automatically activates the pump.
Chemical Pump Carts
Modutek’s chemical pump carts allow for safe removal or dispensing of acid or solvent within your cleanroom. Our chemical pump carts will remove chemical from your process baths and store them safety into a DOT approval container. The DOT approved container is double contained inside our cart.
Modutek’s Collection Systems are designed to give you flexibly when chemical collection is required. We offer many sizes and configurations to meet your containment requirements. From 5 gallon carboy units with DOT approved containers to large collection tanks, we support all applications. Our software system monitors and controls your disposal levels to keep your fab in continuous operation.