Liquid Flow Meters

Sensirion’s liquid flow meters establish new standards wherever monitoring of low liquid flow rates, liquid handling, and liquid dispensing are important. Our unique CMOSens® Technology allows bidirectional measurement of the liquid flow through the wall of the sensor’s flow channel in milliliters, microliters, and down to single-digit nanoliters per minute. Applications in fields such as medical devices, diagnostics, process control, and automation technology benefit daily from our safe and reliable sensor solutions.


SLx Series

The SLx liquid flow meters with their robust IPxx protected housing are the first choice for demanding industrial environments and tabletop test set-ups or standalone applications. The liquid flow meters all provide the same electrical connector and have been designed for operation with the SCC1-USB, SCC1-RS485, and SCC1-Analog sensor cables.

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Lx Series

The Lx liquid flow meters are ideal for integration into an instrument, a device, or an OEM system, e.g. diagnostics or life sciences applications.

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LPG10 Series

The sensors of the LPG10 series are made from a miniature planar glass chip suitable for low flow rate applications where space limitations are a concern. With their down-mount fluidic ports, they allow compact integration into microfluidic manifolds.

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LD20 Series

The LD20 series has been designed as a single-use component for biomedical applications.

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