Dual Frequency RF Generators & Power Supplies
Simplify Operations and Reduce Costs Without Sacrificing Performance
Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements.
The CDX dual frequency RF generator comes in a 2000 watt design. The high frequency (HF) section of the CDX provides 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz.
This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as photovoltaic applications.