Dual Frequency RF Generators & Power Supplies
Simplify Operations and Reduce Costs Without Sacrificing Performance
Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements.
Performance
The CDX dual frequency RF generator comes in a 2000 watt design. The high frequency (HF) section of the CDX provides 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz.
This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as photovoltaic applications.
HF Section:
LF Section: