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Dual Frequency RF Generators & Power Supplies

Simplify Operations and Reduce Costs Without Sacrificing Performance

Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements.

cdx
Performance
The CDX dual frequency RF generator comes in a 2000 watt design. The high frequency (HF) section of the CDX provides 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz.

  • Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
  • Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
  • Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
  • Unique power monitoring in the low-frequency section measures delivered power into any impedance load
  • Optional phase locked output in the low- frequency section eliminates the need for a matching network in many applications

This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as photovoltaic applications.

  • AC input voltage: 187-229 VAC; three phase; 50/60 Hz
  • Line current protection: 20A
  • Analog setpoint and readback levels: 0-10VDC for 0-100% rated power
  • Over-temperature fault: Output disabled when heatsink temp exceeds 60 degrees C
  • Control signals’ input impedance: 100k ohms, minimum
  • Control signals’ input isolation: 100VAC minimum to AC supply line
  • Output power control linearity: 2% or better
  • Forward/Delivered power regulation: +/- 2% of setpoint for load var. within VSWR foldback limits
  • Load mismatch: Output limited to 200 watts under high VSWR conditions
  • Line regulation: +/- 1% output change over 187-229VAC line voltage
  • Control I/O connector: 15-pin subminiature D type
  • Standard available output connector: N or C
  • Cooling: CDX 2000: 1.5 GPM (5.7 liters)
  • Size: 7″H x 19″W x 19″D (17.8cm x 48.3cm x 48.3cm)
  • Weight: 97 lbs. (44 kg)

HF Section:

  • Output power: CDX 1000: 600 watts max. continuous into 50-ohm load, CDX 2000: 1000 watts max. continuous into 50-ohm load
  • Frequency: Any fixed frequency from 2 to 60 MHz
  • Frequency stability: +/- 0.005%
  • Harmonic distortion: All harmonics minimum -30dB with respect to fundamental from 10-100% output power

LF Section:

  • Output power: CDX 1000: 600 watts max. continuous into 50-ohm load, CDX 2000: 1000 watts max. continuous into 50-ohm load
  • Frequency: Any fixed frequency from 20 kHz to 13.56 MHz or 10% variable
  • Frequency stability: +/- 1% • Harmonic distortion: All harmonics minimum -40dB with respect to fundamental from 10-100% output power