Quartzware for Batch Furnace
Heraeus can provide quartzware for all of the common applications such as CVD, epitaxial deposition and other high-temperature processes. Solutions are available for processing 4 inch up to 18 inch wafers.
Heraeus can also provide quartzware ready for install (CFI) enabling our customers to use our products directly after delivery and without any further treatment.
Optimum performance of high-end quartzware is determined by the design optimization, selecting the ideal raw materials and cleanliness during fabrication. Heraeus offers design assistance through our worldwide fabrication network.
Product examples for batch systems are process tubes, liners, wafer carriers, pedestals, gas injectors, bell jars and many more complex components.