Mass Flow Meters for Gases

With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremely reliable and long-term stable and are free from zero-point drift.

At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach – provided by the unparalleled and innovative  CMOSens® Technology  – results in excellent performance at a very attractive cost.

Sensirion offers mass flow meters for diverse applications. Please find in the table below all our standard products. Furthermore, we also develop customized sensor solutions.


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