Quartzware for Single Wafer Applications
Heraeus can provide quartzware for all of the common single wafer applications such as Rings, Windows, GDPs, Injectors, Domes, Liners for CVD, RTP / RTO, EPI and Etch processes.
Solutions are available for processing 4 inch up to 18 inch wafers.
Being vertically integrated Heraeus has in-house access to a variety of base materials to meet specific customer needs.
Optimum performance of the quartzware is determined by design support , choosing the appropriate base material , surface morphology and cleanliness. Heraeus offers design assistance through our worldwide fabrication network.