Quartz Surface Treatments
The surface condition of quartzware plays an essential role, particularly for semiconductor processes.
Heraeus offers quartz surface treatments to increase lifetime of quartz and / or enable cost saving potential.
Heraeus focuses on innovative materials and processes. We use methods that originate from glass blowing as well as from ceramics. A combination of both enables us to fabricate opaque quartz layers on transparent quartz glass – the Heraeus Reflective Coating.
This opaque quartz coating exhibits excellent reflective properties, in particular in the infrared radiation spectrum. This can be used to optimize high-temperature processes in terms of power management and hot-zone uniformity. HRC is derived from the same parent source material as all the other high purity quartz solutions of Heraeus, therefore the CTE is the same as that of quartz
During semiconductor deposition processes the quartzware is coated with thin films. The adhesion of the deposited film to the quartz surface significantly influences the quartzware mean time between cleaning (MTBC) from non CTE matched deposition layers. Heraeus SST is a surface treatment that has been designed to increase the deposited layer thickness and suppress particle generation. This results in lowering the cost of ownership of the quartzware.
For semiconductor etch processes have deposited polymer films Heraeus SST provides a clean surface which provides superior adhesion of the film. This potentially can reduce the burn-in time and prolong the MTBC.