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Mass Flow Controller SFC4000

Sensirion’s mass flow controller SFC4000 offers fast response times and accurate control of gas flows over a wide range.

Based on the CMOSens® Technology the digital calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the analog controlling circuit to control the valve. Thanks to this principle the mass flow controller is insusceptible to electromagnetic interferences. The SFC4000 offers an analog interface (0 – 5 V) and provides stable and precise control of gas flows. Required power supply is unipolar 14 to 24 VDC.

  • Unbeaten price/performance ratio thanks to leading CMOSens®
  • Technology
  • Very high control speed (settling time <100ms)
  • Wide control range (1:1000)
  • High accuracy (0.8% m.v. for 10-100% FS)
  • Fully temperature compensated
  • Analog interface 0-5 V
  • Manufactured under ISO 9001 certified quality control system
  • Rugged chemically inert housing
  • Analytical instruments (e.g. gas chromatography, mass spectrometry)
  • Medical devices (e.g. ventilation, anesthesia)
  • Industrial process automation (e.g. coating, thermal processing)
  • Semiconductor industry (e.g. plasma etching processes, thin film deposition)