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High Frequency RF Power Supplies – CB Series
Comdel’s Superior Design and Reliability in a Small, Lightweight Package
Performance
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel’s proven RF amplifier technology.
cb-series

 

  • Small, lightweight packaging
  • Standard power ranges: 600, 1250, 3000, 5000 Watts
  • Standard fixed frequencies: 3.39 MHz to 30 MHz
  • Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation

 

The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
  • Frequency: Any fixed frequency from 3.39 to 30 MHz
  • Frequency stability: +/- 0.005%
  • Line frequency: 50/60 Hz
  • Analog power command: 0-10 VDC for 0 to maximum output
  • Standard power accuracy: 2 % (higher accuracies available)
  • Standard power linearity: 2% of setting at power levels

 

  • 3.39 and 6.78 MHz options available, added package height required.
  • High accuracy, low output control: +/- 1% of setpoint from 10-100% rated power
  • Internal fixed match
  • Master/Slave operation
  • Frequency tuning
  • DeviceNet