Mass Flow Controller SFC5000

The SFC5000 series enables extremely precise and repeatable control over a wide dynamic measuring range. The excellent performance of the mass flow controllers is based on Sensirion’s innovative CMOSens® Technology which combines the high-precision sensor element and the analog and digital signal processing circuitry on a single CMOS silicon chip.

The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The new mass flow controllers feature both analog and digital interfaces. Furthermore, they enable new optional features such as multi-gas, gas recognition and self-test capability. The mass flow controllers of the SFC5000 series are the ideal solution in different applications across industrial and medical markets.

The SFC5000 is available as mass flow meter too. The SFM5000 model provides the same features like the mass flow controller and is suitable for similar applications.